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Overview
Die to Wafer bonding
Wafer to wafer bonding
mems encapsulation
Videos

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Wafer to wafer bonding with wafers. Both wafer surfaces are prepared for bonding. Spacers keep the wafers separated. Contacting the wafers at the center spontaneously starts the bond and moves the bond front to the edge of the wafer. To be able to show this bond front a LiTaO3 wafer is bonded to a Silicon wafer using the ZiBond process.

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